Side yard full of critter holes. Do I use a tiller to break them up and replant the grass?

So i have a large section of my yard with animal holes probably chipmonks. Its gotten progressively worse the last few years. Its hard to push the mower over it, the wheels catch in the holes and ruts. Do I use a tiller to dig them up or something else? I was then going to add some top soil and replant the grass. Then spread some coyote urine around. Is this the right approach?