Did Vader himself hunt down the remaining Jedi after Order 66? (In Canon)

I was just curious about the history after episode III. Did Vader himself hunt down and kill the remaining Jedi before the Empire started using the inquisitors? I know that after they started using the inquisitors Vader was the overseer of their operations, but before was he the one doing it? Thanks and i'm looking for an answer that is within the Star Wars CANON.